Comparative study of the roughness of optical surfaces and thin films by use of X-ray scattering and atomic force microscopy |
| |
| Authors: | Asadchikov V E Duparré A Jakobs S Karabekov A Y Kozhevnikov I V Krivonosov Y S |
| |
| Affiliation: | Institute of Crystallography, Leninsky prospect 59, Moscow 117333 Russia. |
| |
| Abstract: | The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement. |
| |
| Keywords: | |
| 本文献已被 PubMed 等数据库收录！ |
