Nanopositioning for storage applications |
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| Authors: | Evangelos Eleftheriou |
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| Affiliation: | 1. LOOP – Process Observation and Optimization Laboratory, Department of Electrical and Computer Engineering, Université Laval, Québec, Canada;2. LOOP – Process Observation and Optimization Laboratory, Department of Mining, Metallurgical and Materials Engineering, Université Laval, Québec, Canada;1. Dep. Matemática, Fac. Ciěncias, Universidade do Porto (FCUP), Rua do Campo Alegre, 4169-007 Porto, Portugal;2. Center for Research & Development in Mathematics and Applications (CIDMA), Dep. Matemática, Campus Universitário de Santiago, 3810-193 Aveiro, Portugal;2. Unidade Local de Saúde de Matosinhos, Matosinhos, Portugal;3. FCUP, Portugal; CIDMA, Portugal;4. IT-UU, Sweden;1. Faculty of Science and Engineering, Doshisha University, 1-3 Tataramiyakodani, Kyotanabe, Kyoto 610-0321, Japan;2. Faculty of Life and Medical Sciences, Doshisha University, 1-3 Tataramiyakodani, Kyotanabe, Kyoto 610-0321, Japan;3. Wave Electronics Research Center, Doshisha University, 1-3 Tataramiyakodani, Kyotanabe, Kyoto 610-0321, Japan;4. Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259-R2-26 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan |
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| Abstract: | In nanotechnology applications, nanopositioning, i.e., nanometer-scale precision control at dimensions of less than 100 nm, plays a central role. One can view nanopositioners as precision mechatronics systems aiming at moving objects over a certain distance with a resolution that could be as low as a fraction of an Ångström. Actuation, position sensing and feedback control are the key components of nanopositioners that determine how successfully the stringent requirements on resolution, accuracy, stability, and bandwidth are achieved. Historically, nanopositioning has played a critical role in scanning probe microscopy (SPM), and it appears that it will play a crucial role in emerging applications such as lithography tools and semiconductor inspection systems, as well as in molecular biology, nanofabrication, and nanomanufacturing. Moreover, it is becoming an important requirement in storage systems, ranging from novel probe-based storage devices to mechatronic tape-drive systems, to support the high areal density or storage capacity needs. This paper will review control-related research in nanopositioning for two extreme cases of data-storage systems, namely, in probe and in tape storage. |
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