| Study of relationship between structure and transmittance of diamond-like carbon (DLC) films |
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| 作者姓名： | 林松盛 侯惠君 朱霞高 袁镇海 戴达煌 李洪武 |
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| 作者单位： | Research &Development Center for Materials &Surface Engineering Technique under Guangzhou Research Insti-tute of Non-ferrous Metals Guangzhou 510651，China，Guangdong University of Technology Guangzhou 510090，China，Research &Development Center for Materials &Surface Engineering Technique under Guangzhou Research Insti-tute of Non-ferrous Metals Guangzhou 510651，China，Research &Development Center for Materials &Surface Engineering Technique under Guangzhou Research Insti-tute of Non-ferrous Metals Guangzhou 510651，China，Research &Development Center for Materials &Surface Engineering Technique under Guangzhou Research Insti-tute of Non-ferrous Metals Guangzhou 510651，China，Research &Development Center for Materials &Surface Engineering Technique under Guangzhou Research Insti-tute of Non-ferrous Metals Guangzhou 510651，China，Research &Development Center for Materials &Surface Engineering Technique under Guangzhou Research Insti-tute of Non-ferrous Metals Guangzhou 510651，China |
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| 摘 要： | 1IntroductionArtificial synthesis of diamond and diamond-like carbon(DLC)have beenthe advanced andfocused re-search aspect in materials science for about twenty years.As a wear-resistant protective fil m,diamond-likecarbon fil m has extensive applications.Due to different matrix and service conditions,different requestswere proposed to properties and deposition conditions of diamond-like carbon.There has been many methods to prepare DLCfil m,however,most of DLCfil ms were not transpar-ent.…
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Study of relationship between structure and transmittance of diamond-like carbon (DLC) films |
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| LIN Song-sheng ,HOU Hui-jun,ZHU Xia-gao,YUAN Zhen-hai,DAI Da-huang,LI Hong-wu.Study of relationship between structure and transmittance of diamond-like carbon (DLC) films[J].Journal of Guangdong Non-Ferrous Metals,2005(Z1). |
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| Authors: | LIN Song-sheng HOU Hui-jun ZHU Xia-gao YUAN Zhen-hai DAI Da-huang LI Hong-wu |
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| Affiliation: | LIN Song-sheng~ 1,2,HOU Hui-jun~1,ZHU Xia-gao~1,YUAN Zhen-hai~1,DAI Da-huang~1,LI Hong-wu~1 |
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| Abstract: | In this paper, the transparent hard diamond-like carbon (DLC) films were deposited on glass substrate by magnetic confined radio-frequency plasma chemical vapor deposition. The structure of films was studied by Raman spectra and X-ray photoelectron spectra (XPS), the transmittance of films by Spectrophotometer. The mechanism of the influence of films structure on transmittance of the films was discussed. The results show that the thickness of films was lower than 100nm, and the transmittance was over 90% in 380-780 nm region. Discussion in theory on the influence of film structure on transmittance was correspondence to experiment results. |
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| Keywords: | diamond-like carbon films radio-frequency plasma chemical vapor deposition structure of the films transmittance |
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