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Reproducibility and accuracy of spatial measurements from digitally captured images in the environmental scanning electron microscope
Authors:D R Cousens  N N Kinaev  M Ranasinghe
Abstract:Accurate spatial measurements in a scanning electron microscope (SEM) require calibration of the magnification as a function of working distance and microscope operating conditions. This work presents the results of the calibration of an environmental SEM for the accurate spatial measurement of dimensions and areas in experiments, both for the measurement of strain in steel specimens under applied loads and the measurement of dimensional changes in timber with changes in relative humidity.
Keywords:environmental scanning electron microscope  scanning electron microscope  spatial  calibration
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