| Abstract: | TiN films were deposited on stainless steel samples using a new coating procedure, the so-called modified pulse arc process. The influence of titanium nitride films on the outgassing rate was studied and the obtained results were discussed. Measurements of the outgassing rate carried out with untreated stainless steel samples and with stainless steel samples coated with titanium nitride by DC arc process are compared with the results obtained from the samples coated with the modified pulse arc process in order to get information about the influence of the coating procedure on the outgassing rate. |
