| Abstract: | Secondary neutral mass spectrometry (SNMS) based on electron gas postionization is described with regard to its historical developments, its fundamental properties and figures of merit. The quantifiability of SNMS signals, the low detection limits and the excellent depth resolution are shown to be the outstanding potentialities of SNMS. Recent and ongoing instrumental developments are described. In particular, the novel high frequency mode HFM of SNMS allows the analysis of completely or partially insulating samples in almost the same way as the conventional direct bombardment mode for conducting materials. A new generation of SNMS instruments is designed such that X-ray induced Photo Electron Spectroscopy XPS can be incorporated in situ as an option. |
