氩气流量对等离子体喷射法制备的金刚石膜形核的影响

采用100kW级直流电弧等离子喷射法进行金刚石膜沉积,阐述了氩气对维持电弧稳定的重要作用,讨论了氩气流量对衬底表面轰击的影响,氩气流量和不同电弧分区对形核期金刚石表面形貌和晶粒尺寸的影响,以及时间和不同预处理方式对金刚石形核密度的影响。结果表明:随着氩气流量的增加,氩气对衬底表面的轰击作用增强,金刚石膜表面形貌呈现从(111)到(100)的变化规律,金刚石晶粒尺寸减小,晶形变得不完整;弧边位置(100)取向更明显;使用金刚石微粒对衬底进行研磨预处理能显著提高金刚石的形核密度。

Effects of Ar flow on diamond nucleation produced by DC arc plasma jet method

The importance of Ar to keep arc stable was demonstrated in deposition of diamond films using DC arc plasma jet.The effects of Ar flow on bombardment to the surface of substrate were investigated.Meantime,effects of Ar flow,arc area and pretreatment method on diamond surface morphology,grain size during nucleation and diamond nucleation density fabricating were discussed.The results showed that due to enhanced bombardment effect of Ar on surface of substrate,the growth orientation of diamond morphology changed from（111）to（100）and the diamond grain size decreased and grain shape became imperfect with the increase of Ar flow.But the orientation of diamond（100）was more obvious at arc edge.The diamond nucleation density increased obviously by pre-grinding on the substrate with diamond particles.