| 微型机电系统的计算机辅助设计系统简介 |
| |
| 引用本文： | 朱俊华,周兆英,叶雄英.微型机电系统的计算机辅助设计系统简介[J].仪表技术与传感器,2000(1):1-3,7. |
| |
| 作者姓名： | 朱俊华 周兆英 叶雄英 |
| |
| 作者单位： | 清华大学精密仪器与机械学系,北京市,100084 |
| |
| 摘 要： | 虽然微型机电系统的制造通常使用基于集成电路工艺的平面制造技术，但由于ＭＥＭＳ器件的三维特性，使它与ＩＣ的制造有很大不同。而且，它涉及复杂的多能量域问题，给设计分析带来一较大难度。为加快ＭＥＭＳ的设计过程，需要有相应的计算机辅助设计系统（ＭＥＭＳＣＡＤ）。文中介绍了ＭＥＭＳＣＡＤ的系统结构及国外的发展现状。
|
| 关 键 词： | MEMS CAD 仿真 建模 微型机电系统 |
The Introduction of CAD Systems for Microelectromechanical System |
| |
| Zhu Junhua,Zhou Zhaoying,Ye Xiongying.The Introduction of CAD Systems for Microelectromechanical System[J].Instrument Technique and Sensor,2000(1):1-3,7. |
| |
| Authors: | Zhu Junhua Zhou Zhaoying Ye Xiongying |
| |
| Affiliation: | Zhu Junhua
,Zhou Zhaoying
,Ye Xiongying
(Dept. of Precision Instruments, Tsinghua Univ., Beijing 100084) |
| |
| Abstract: | Although MEMS devices are generally fabricated using the surface micromachining technologies that develop from IC fabrication technologies. The 3D structures of MEMS and its coupled multi-energy-domain simulation introduce great difficulties for design and analysis. CAD systems designed specifically for MEMS are very important to enhance the design abilities of designers and accelerate the development of MEMS industry. This paper introduces the structure of CAD systems for MEMS and the status of present researches of MEMS CAD. |
| |
| Keywords: | MEMS CAD Simulation Modelling |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
