Hard transparent dielectric coatings

Hard transparent corrosion-resistant dielectric coatings were investigated (a) for application to the direct protection of glass surfaces, (b) for application to the protection of thin film metallic window coatings used for reflection or transmission of solar radiation and (c) for use in codeposited metal-ceramic coatings. The dielectric coatings were Al₂O₃, SiO₂ and SiC in the thickness range 100–100 000 Å. The coatings were deposited under varying conditions of substrate temperature, gas composition, r.f. power and substrate preparation. The results of the following measurements on the dielectric coatings are presented: diamond pyramid hardness tests, optical reflectance and transmittance in the region 0.6–4.0 eV and corrosion resistance tests under cyclic conditions. The results showed a considerable improvement in the scratch resistance and hardness of glass by layering of hard dielectric coatings 2–5 μm thick.