Unusual thickness dependence of the dielectric constant of erbium oxide films

The thickness dependence of the dielectric constant of Er₂O₃ films was studied. It was found that for films less than 700 Å thick and greater than 1300 Å the dielectric constant ε shows the usual behaviour of increasing with increasing thickness and then assuming the limiting bulk value. However, for films of intermediate thicknesses (700–1300 Å) the dielectric constant first decreases, attains a minimum value and then increases to obtain the bulk value. It is suggested, based on electron microscope observations, that this curious thickness dependence of ε arises because of the transformations from (i) amorphous to crystalline and (ii) f.c.c. type to b.c.c. type crystalline phases in the films.