| 压阻式压力传感器的动态特性 |
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| 引用本文： | 戴艳梅,王文襄. 压阻式压力传感器的动态特性[J]. 传感器与微系统, 1999, 18(3): 52-53 |
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| 作者姓名： | 戴艳梅 王文襄 |
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| 作者单位： | 1. 河北省技术监督局,石家庄,050051
2. 宝鸡传感器研究所 |
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| 摘 要： | 综合分析了敏感元件构形与尺寸及传感器的封装结构对动态压力测量的影响。给出了几种ＣＹＧ压阻式压力传感器在动态压力测量时的频响特性的理论计算值与实验值。
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| 关 键 词： | 压阻 平膜片 压力传感器 固有频率 |
| 修稿时间： | :1999－03－24 |
Dynamic Rexponse Characteristics of Piezoresistive Pressure Transducer |
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| Dai Yanmei,Wang Wenxiang. Dynamic Rexponse Characteristics of Piezoresistive Pressure Transducer[J]. Transducer and Microsystem Technology, 1999, 18(3): 52-53 |
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| Authors: | Dai Yanmei Wang Wenxiang |
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| Abstract: | Effects of sensor geometry and transducer package structureon the measurement of dynamic pressure are synthetically analyzed.Theoretical and experimental results for the dynamic response of oscillatory pressure measurement of various type of CYG piezoresistive pressure transducers are presented. |
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| Keywords: | PiezoresistiveFlat diaphragmPressure transducerNatural frequency |
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