The properties of Ba0.5Sr0.5TiO3 thin film prepared by RF magnetron sputtering from powder target |
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Authors: | Guisheng Zhu Zupei YangHuarui Xu |
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Affiliation: | a School of Chemistry and Materials Science, Shaanxi Normal University, Xian 710062, PR China b Guangxi Key Laboratory of Information Materials, Guilin University of Electronic Technology, Guilin 541004, PR China |
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Abstract: | The Ba0.5Sr0.5TiO3 (BST) thin film with the thickness of 400 nm deposited from powder target is prepared by the radio-frequency magnetron sputtering technique. The deposition rate of BST film is estimated to be 45 nm/min, which is very fast for ferroelectric materials. The dielectric properties of the as-prepared BST thin film are demonstrated. High dielectric tunability up to 42.7% and low dielectric loss small to 0.01 are achieved at a low applied voltage of 5 V. The results demonstrate that the RF magnetron sputtering from powder target is a versatile, novel technique for the deposition of high-quality ferroelectric thin films. |
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Keywords: | Ba0.5Sr0.5TiO3 (BST) thin film Powder target Dielectric tenability Deposition rate |
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