| 钼圆片生产的工艺设计及质量控制 |
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| 引用本文： | 谌启明. 钼圆片生产的工艺设计及质量控制[J]. 稀有金属与硬质合金, 2001, 0(4): 30-35 |
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| 作者姓名： | 谌启明 |
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| 作者单位： | 长沙有色冶金设计研究院稀冶室, |
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| 摘 要： | 在总结多年产品开发研究、设计经验的基础上，对钼圆片生产方式进行了综合分析比较，着重对钼板冲制、机加工方式生产相圆片的工艺设计和质量控制进行了全面的讨论。
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| 关 键 词： | 钼圆片 基片 工艺设计 质量控制 冲压 机械加工 |
| 文章编号： | 1004-0536(2001)04-0030-06 |
| 修稿时间： | 2001-06-04 |
Process Design and Quality Control of Mo Wafers Production |
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| SHEN Qi-ming. Process Design and Quality Control of Mo Wafers Production[J]. Rare Metals and Cemented Carbides, 2001, 0(4): 30-35 |
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| Authors: | SHEN Qi-ming |
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| Abstract: | Summary is made on the several years of product development and design experiences.Analysis and comparison is made of the Mo disk process with emphasis on overall discussion regarding the process design and quality control of Mo wafers production by Mo plate punching and machining. |
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| Keywords: | Mo wafer substrate process design quality control |
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