| 磁性微电子机械系统(MMEMS)中的关键问题 |
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| 引用本文： | 尉旭波,石玉,张怀武,刘颖力.磁性微电子机械系统(MMEMS)中的关键问题[J].磁性材料及器件,2005,36(1):35-37,41. |
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| 作者姓名： | 尉旭波 石玉 张怀武 刘颖力 |
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| 作者单位： | 电子科技大学,微电子与固体电子学院,四川成都,610054;电子科技大学,微电子与固体电子学院,四川成都,610054;电子科技大学,微电子与固体电子学院,四川成都,610054;电子科技大学,微电子与固体电子学院,四川成都,610054 |
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| 摘 要： | 磁性微电子机械系统(MMEMS)是在传统的微电子机械系统(MEMS)基础上发展的,它在科学研究及应用领域中有着巨大的潜力.磁性材料和MEMS技术的兼容性问题此前已作为一个重要的问题论述过.本文就磁性MEMS技术中的线圈制作、软磁膜制备及硬磁膜制备等关键性问题加以概述.
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| 关 键 词： | 磁性MEMS 线圈 磁膜 |
| 文章编号： | 1001-3830(2005)01-0035-03 |
Key Issues in Magnetic Micro-electro-mechanical-systems(MMEMS) |
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| WEI Xu-bo,SHI Yu,ZHANG Huai-wu,LIU Ying-li.Key Issues in Magnetic Micro-electro-mechanical-systems(MMEMS)[J].Journal of Magnetic Materials and Devices,2005,36(1):35-37,41. |
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| Authors: | WEI Xu-bo SHI Yu ZHANG Huai-wu LIU Ying-li |
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| Abstract: | Magnetic micro-electro-mechanical-systems (MMEMS) are developed based on conventional MEMS with great potential for science and applications. The compatibility of magnetic materials with MEMS technologies as a key issue has been addressed. In this article, we will present an overview of key issues of the MMEMS technology, such as coil fabrication, soft magnetic films and hard magnetic films fabrication. |
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| Keywords: | MMEMS coil magnetic film |
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