基于高速摄影动态测试微陀螺振动

针对微机电系统(MEMS)特征尺寸小,常用的动态测试方法和系统还有一定的缺点等问题,本文在介绍MEMS常见的三种动态测试方法的基础上,给出了一种基于高速摄影的微陀螺振动动态测试系统。介绍了系统的硬件架构和软件功能。在动态测试的关键算法上,应用Otsu算法对图像进行分割,使用感兴趣区域(ROI)和不变矩方法得到振动曲线,通过幅频分析得到微机械陀螺的振动特性。实验结果表明:使用这种方法测量振幅的精度达到了0.1 μm;频域测量的重复性和一致性也较好。这种动态测试方法稳定可靠、精度高、抗干扰能力强,可以极大地减少计算量,提高系统运行速度。

Dynamic test of vibration for micro machined gyroscope based on high speed photography

As the common dynamic test method for Micro-electro-mechanical System (MEMS) is limited by its tiny feature sizes, this paper proposes a dynamic test system for micro machined gyroscope based on high speed photography after introducing three kinds of dynamic test methods. The hardware of the system and the function of the software are introduced. Then, it explains the key algorithm of the dynamic test system. It uses the Otsu algorithm to segment the image, and takes the region of Interest (ROI) and moment invariants to obtain the vibration curve. After spectrum analysis, the vibration characteristic of the micro machined gyroscope can be gotten. Experimental results indicate that the precision of the amplitude is 0.1 μm and the repeatability and consistency of the frequency domain is satisfactory. The dynamic test method shows higher precision, rapid speed, as well as strong anti-jamming and stabilization. It reduces the amount of calculation and improves the operation speed for the system.