| 提高硅压阻传感器精度的探讨 |
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| 引用本文： | 刘存,孙立华. 提高硅压阻传感器精度的探讨[J]. 沈阳工业大学学报, 1987, 0(2) |
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| 作者姓名： | 刘存 孙立华 |
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| 摘 要： | 本文首先建立了扩散硅压力敏感器件的数学模型,进而讨论了一种可同时获得高精度宽温度范围的方法。所得结果与实验相符。
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| 关 键 词： | 硅 扩散膜 压力 传感器 精度 |
Research for Improving Accuracy of Diffused Silicon Pressure Sensor |
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| Liu Cun. Research for Improving Accuracy of Diffused Silicon Pressure Sensor[J]. Journal of Shenyang University of Technology, 1987, 0(2) |
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| Authors: | Liu Cun |
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| Abstract: | This paper discusses the mathematical mode for diffused silicon pressure sensor. Then describes a method for measuring with accuracy in wide temperature range. |
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| Keywords: | silicon diffusion barriers pressures sensors precision |
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