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CCD多晶硅层间绝缘介质对器件可靠性的影响
引用本文:刘秀娟,廖乃镘. CCD多晶硅层间绝缘介质对器件可靠性的影响[J]. 半导体光电, 2016, 37(1): 178-180,189
作者姓名:刘秀娟  廖乃镘
作者单位:1.北京工业大学光电子技术省部共建教育部重点实验室;;1.北京工业大学光电子技术省部共建教育部重点实验室;;1.北京工业大学光电子技术省部共建教育部重点实验室;;2.中国科学院半导体研究所;
基金项目:国家自然科学基金项目(61376049)
摘    要:报道了使用石墨烯作为阳极材料的GaN肖特基型紫外探测器。介绍了光敏面为1mm×1mm的新型肖特基紫外探测器的制备过程。并对器件进行了响应光谱、I-V特性测试。器件的响应光谱较为平坦,峰值响应度为0.175A/W;通过对石墨烯进行化学修饰,使峰值响应度增加到0.23A/W。并根据热电子发射理论,计算出了器件掺杂前后的肖特基势垒高度分别为0.477eV和0.882eV,验证了器件性能的提高主要原因是石墨烯功函数的增加。 更多还原

关 键 词:GaN; 肖特基; 紫外探测器; 石墨烯; 响应光谱;
收稿时间:2015-10-21

Effects of Inter-layer Insulating Dielectric of Polysilicon on Reliability of Charge-coupled Device
Abstract:A kind of GaN Schottky ultraviolet detector with graphene as the anode was reported, and the fabrication of the devices with a photosurface as large as 1mm×1mm was introduced. The I-V characteristics and response spectrum of the devices were measured. The response spectrum is flat and the peak value is 0.175A/W. Then it was improved to 0.23A/W by making graphene chemical doping. Based on the thermionic emission theory, Schottky barrier height was calculated to be 0.477eV and 0.882eV before and after chemical doping, which abundantly proves that the performance improvement is mainly due to the increase of work function of graphene.
Keywords:charge-coupled device   polysilicon   break-down voltage   reliability
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