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Erratum to ’Experimental and numerical analysis of rapid reaction to initiate the radical chain reactions in WSix CVD“ [Thin Solid Films 320 (1998) 151–158] |
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| Authors: | Y. K. Chae Y. Egashira Y. Shimogaki K. Sugawara H. Komiyama |
| Affiliation: | a Department of Chemical System Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan b Department of Computer Science, College of Engineering, Nihon University, Tokyo 113, Japan |
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