| Ti过渡层厚度对Ti—TiN薄膜结合强度的影响 |
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| 引用本文： | 尹蓝. Ti过渡层厚度对Ti—TiN薄膜结合强度的影响[J]. 军民两用技术与产品, 2009, 0(6): 41-42 |
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| 作者姓名： | 尹蓝 |
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| 作者单位： | 北京航空航天大学机械工程及自动化学院,北京,100083 |
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| 摘 要： | 薄膜脱落的主要原因之一是受薄膜与基体上的界面应力影响，TiN薄膜和钢基体由于其力学性能差异较大，在界面上有很大的应力集中，在钢基体上沉积Ti过渡层能减小其界面应力。研究Ti过渡层厚度对膜基体系结合强度的影响．并借助有限元方法对不同过渡层厚度的膜基体系的界面应力进行分析，研究表明，适当厚度的过渡层能提高Ti-TiN膜层的结合强度。
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| 关 键 词： | 划痕实验 结合强度 过渡层 有限元方法 |
Influence of Ti Interlayer Thickness on the Adhesion of Ti-TiN Multilayer Film |
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| Yin Lan. Influence of Ti Interlayer Thickness on the Adhesion of Ti-TiN Multilayer Film[J]. Universal Technologies & Products, 2009, 0(6): 41-42 |
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| Authors: | Yin Lan |
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| Affiliation: | School of Mechanical Engineering and Automation;Beihang University;Beijing 100083 |
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| Abstract: | A main reason of the film delamination is the large interfacial stress,which is caused by the different echanical properties between TiN coating and steel substrate.Depositing Ti interlayer on the steel substrate can decrease the interfacial stress.The influence of Ti interlayer thickness on the adhesion is investigated,and the interfacial stress is studied using finite element method.The research indicates that suitable interlayer thickness can improve the adhesion of Ti-TiN multilayer film. |
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| Keywords: | Scratching test Adhesion Interlayer Finite element method |
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