| 双波长数字波面干涉术及其误差的消除 |
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| 引用本文： | 卓永模 李天平. 双波长数字波面干涉术及其误差的消除[J]. 浙江大学学报(工学版), 1989, 23(4): 499-508 |
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| 作者姓名： | 卓永模 李天平 |
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| 作者单位： | 浙江大学光仪系(卓永模)，浙江大学光仪系(李天平) |
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| 摘 要： | 本文论述双波长数字波面干涉术的原理及算法,分析该技术的主要误差及其校正方法。整个软件在IBM—PC上运行通过,完成了自动检测过程并给出表面形貌及主要参数。
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| 关 键 词： | 双波长 干涉术 等效波长 误差修正 |
The Two-Wavelength Digital Wavefront Interferometry and the Method for the Error-Reduction |
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| Zhuo Yongmo Li Tiangpin. The Two-Wavelength Digital Wavefront Interferometry and the Method for the Error-Reduction[J]. Journal of Zhejiang University(Engineering Science), 1989, 23(4): 499-508 |
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| Authors: | Zhuo Yongmo Li Tiangpin |
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| Affiliation: | ( Dept.of optical Instrument |
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| Abstract: | This paper describes the principle of the two-wavelength digital wavef-ront interferometry and the computational method. The analyses are also given to the main errors and the removing method. The whole softwares is operated in IBM-PC to complete the course of automatic measuring and data proceseing for surface figure and parameters related. |
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| Keywords: | Two-wavelength Interferometry Equivalence-wavelength Error-re duction. |
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