| RF-PCVD法制备纳米碳化钨微晶的研究 |
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| 引用本文： | 展红全,孙彦平.RF-PCVD法制备纳米碳化钨微晶的研究[J].陶瓷学报,2006,27(2):176-180. |
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| 作者姓名： | 展红全 孙彦平 |
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| 作者单位： | 景德镇陶瓷学院材料科学与工程学院,333001 |
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| 摘 要： | 采用高频等离子体化学气相沉积法(RF-PCVD),以WCl6 C2H2 H2的反应体系来制备纳米碳化钨微晶,实验制得了粒径小于100nm,平均粒径为50nm的纳米碳化钨微晶样品。理论分析和实验结果都表明:RF-PCVD法制备的碳化钨样品比较复杂,含有WC,W2C,WC1-x等三种碳化钨。其中WC的硬度较高,而W2C,WC1-x的催化活性较好。
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| 关 键 词： | 高频等离子体 化学气相沉积法 纳米 |
| 文章编号： | 1000-2278(2006)02-0176-05 |
| 收稿时间： | 2006-02-15 |
| 修稿时间： | 2006年2月15日 |
RESEARCH ON PREPARING NANO TUNGSTEN CARBIDE MICROCRYSTAL BY RF-PCVD |
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| Zhan Hongquan,Sun Yanping.RESEARCH ON PREPARING NANO TUNGSTEN CARBIDE MICROCRYSTAL BY RF-PCVD[J].Journal of Ceramics,2006,27(2):176-180. |
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| Authors: | Zhan Hongquan Sun Yanping |
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| Affiliation: | Jingdezhen Ceramic Institute, 333001 |
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| Abstract: | With WCl2 C2H2 H2 reaction system, the nano tungsten carbide microcrystal was prepared by radio frequency plasma chemical vapor deposition (RF-PCVD). TEM results showed: the tungsten carbide particle diameter was less than 100 nm, Its mean particle diameter was 50 nm . The theoretical analysis and experiment results showed : the tungsten carbide prepared by RF-PCVD was complex, including WC, W2C, WC1-x. WC was used as a hard alloy while W2C and WC1-x were good catalysts . |
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| Keywords: | WC W2C WC1-x |
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