Tribological Challenges in Micromechanical Systems |
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Authors: | Maboudian Roya Ashurst W Robert Carraro Carlo |
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Affiliation: | (1) Department of Chemical Engineering, University of California, Berkeley, CA 94720, USA |
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Abstract: | Despite much progress in surface micromachining technology, adhesion, friction and wear remain key issues, severely limiting the realization and reliability of many microelectromechanical systems (MEMS) devices. In this article, we focus on the use of molecularly thin organic films as release and anti-stiction coatings for MEMS. The various classes of organic films explored for MEMS are reviewed here, followed by a discussion of the current limitations and areas for improvements for this coating technology. |
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Keywords: | MEMS molecular films stiction self-assembled monolayers |
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