Simulations and Measurement of Electron Energy and Effective Electron Temperature of Nanosecond Pulsed Argon Plasma |
| |
| Authors: | WEN Xueqing XIN Yu FENG Chunlei DING Hongbin |
| |
| Affiliation: | 1.School of Physics and Optical Electronic Technology, Key Laboratory of Material Modifica- tion by Laser, Ion and Electron Beam, Chinese Ministry of Education, Dalian University of Technology, 116023 Dalian, China;2.School of Physics and Optical Electronic Technology, Key Laboratory of Material Modifica- tion by Laser, Ion and Electron Beam, Chinese Ministry of Education, Dalian University of Technology, 116023 Dalian, China;3.School of Physics and Optical Electronic Technology, Key Laboratory of Material Modifica- tion by Laser, Ion and Electron Beam, Chinese Ministry of Education, Dalian University of Technology, 116023 Dalian, China;4.School of Physics and Optical Electronic Technology, Key Laboratory of Material Modifica- tion by Laser, Ion and Electron Beam, Chinese Ministry of Education, Dalian University of Technology, 116023 Dalian, China |
| |
| Abstract: | The behavior of argon plasma driven by nanosecond pulsed plasma in a low-pressure plasma reactor is investigated using a global model, and the results are compared with the experimental measurements. The time evolution of plasma density and the electron energy probability function are calculated by solving the energy balance and Boltzmann equations. During and shortly after the discharge pulse, the electron energy probability function can be represented by a bi-Maxwellian distribution, indicating two energy groups of electrons. According to the effective electron temperature calculation, we find that there are more high-energy electrons that play an important role in the excitation and ionization processes than low-energy electrons. The effective electron temperature is also measured via optical emission spectroscopy to evaluate the simulation model. In the comparison, the simulation results are found to be in agreement with the measure- ments. Furthermore, variations of the effective electron temperature are presented versus other discharge parameters, such as pulse width time, pulse rise time and gas pressure. |
| |
| Keywords: | effective electron temperature model optical emission spectrum nanosecond pulsed glow discharge global |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
