| 用等离子体离子辅助沉积高性能红外增透膜 |
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| 引用本文： | 苏星 李正芬. 用等离子体离子辅助沉积高性能红外增透膜[J]. 红外技术, 1996, 18(6): 4-6 |
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| 作者姓名： | 苏星 李正芬 |
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| 作者单位： | 昆明物理研究所 |
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| 摘 要： | 介绍了等离子体离子辅助沉积技术，用该技术制备了高性能的中红外增透膜，给出了该增透膜的光学性能和耐久性试验结果。
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| 关 键 词： | 离子辅助沉积 红外增透膜 红外光学系统 |
Plasma-IAD Deposited High Performance IR AR Coatings |
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| Su Xing, Li Zhengfen, Zhao Yunsheng, Ma Xiaomei. Plasma-IAD Deposited High Performance IR AR Coatings[J]. Infrared Technology, 1996, 18(6): 4-6 |
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| Authors: | Su Xing Li Zhengfen Zhao Yunsheng Ma Xiaomei |
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| Abstract: | Plasma ion-assisted deposition (APS-LAD) technique is introduced. Hihg performance MIR AR coatings have been fabricated with this method. Optical characteristics and durability of these coatings are reported. |
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| Keywords: | Ion-assisted deposition AR coatings |
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