激光诱导击穿光谱法分析精度提高的研究

信号波动严重、强烈的连续发射干扰复杂光谱、激光能量波动、重复性差等影响激光诱导击穿光谱法（Laser Induced Breakdown Spectrometry，简称LIBS）的分析精度。本文在自主研制的激光光谱仪上，通过采用激光光束调整技术兼顾空间分辨率和数据稳定性，门控积分技术提高LIBS的分析灵敏度和检测下限，数据筛选技术提高数据的可靠性等手段提高了LIBS的分析精度。对一中低合金钢中的C、Si、Mn、P、S、B、Mo、Ni、Cr、V、Cu、Ti、Al、W、Fe 等15个元素进行LIBS测定，测定结果的相对标准偏差除P和B外，其他元素均小于10%，分析精度高于文献报道的LIBS。

Study on the improvement of analysis precision for laser induced breakdown spectrometry

The analytical precision of laser induced breakdown spectrometry(LIBS) was influenced by severe signal fluctuation,strong continuous emission interference complex spectrum,laser energy fluctuation and bad repeatability.In this study,based on the self-developed laser spectrometer,the spatial resolution and data stabilization was taken in to account with laser beam adjusting technique;the analytical sensitivity and lower limit of detection was improved with gating integration techniques;the reliability of data was improved by data screening technology.Thus,the analytical precision of LIBS was enhanced.Fifteen elements including C,Si,Mn,P,S,B,Mo,Ni,Cr,V,Cu,Ti,Al,W and Fe in amiddle-low alloy steel were determined by LIBS.Except for P and B,the relative standard deviations of determination results were all less than 10 %.The analytical precision was better than those of LIBS reported in references.