High‐sensitivity QCM with multielectrode piezoelectric quartz crystal design

The ideal linear elastic, small hysteresis phenomenon makes the quartz resonator uniquely useful for Quartz Crystal Microbalances (QCM). Enhanced high‐precision integrated quartz crystal resonators were designed based on the common‐mode rejection principle. The internal stress of quartz crystal on the force was analyzed for the multielectrode design, and the point which located the electrode (diameter is 1 mm) is distributed on the circle from 4 mm to the center of the quartz crystal plate, and the orientation angle φ=60°. The 15 group difference frequency signals were first done the difference frequency processing and then superposition by information fusion technology. The final force sensitivity coefficient of integrated resonator is 11223 Hz/N. It is 10 times than the single resonator. The frequency stability of each electrode is shown 10^?10 order of magnitudes.