| 光外差法测量转盘微小偏心距 |
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| 引用本文： | 蔡式东,邱吉衡,张显炽.光外差法测量转盘微小偏心距[J].四川激光,1993(2). |
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| 作者姓名： | 蔡式东 邱吉衡 张显炽 |
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| 作者单位： | 西安电子科技大学 西安
(蔡式东，邱吉衡)，西安电子科技大学 西安(张显炽) |
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| 摘 要： | 本文介绍了一种利用光外差测量原理测量旋转转盘偏心距的新方法。给出了用CO_2激光器做为本振光源,旋转圆盘做为目标,对旋转偏心距进行测量所需满足的条件和测量结果。
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| 关 键 词： | 光外差检测 转盘微小偏心距 |
The rotary turntable eccentricity measurement by using optical heterodyne |
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| Cai Shidong Qiu Jiheng Zhang Xianzhi.The rotary turntable eccentricity measurement by using optical heterodyne[J].Laser Journal,1993(2). |
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| Authors: | Cai Shidong Qiu Jiheng Zhang Xianzhi |
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| Abstract: | A new method of measuring eccentricity of rotary turntable by means of optical heterodyne is described. The experimental requirments are furnished with CO2 laser as local oscillator and rotary turntable as target, aadthe measurement results are given and analysed. |
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| Keywords: | optical heterodyne detection eccentricity of rotary turntable |
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