Optimisation of a thick-film 10–400 N force sensor |
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Authors: | Thomas Maeder, Gr gory Affolter, Niklaus Johner, Giancarlo Corradini,Peter Ryser |
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Affiliation: | aLaboratoire de Production Microtechnique (LPM), Ecole Polytechnique Fédérale de Lausanne (EPFL), BM 3.142, EPFL Station 17, CH-1015 Lausanne, Switzerland |
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Abstract: | The ring-on-ring bending principle allows the fabrication of simple, low-cost thick-film piezoresistive sensors for compressive forces in the 10–400 N range. However, some imperfections are encountered in its basic embodiment, such as relatively high force-signal hysteresis and nonrepeatability (up to ca. 5%). These shortcomings were studied in this work, and major improvements have been achieved. Hysteresis was found to be mainly due to friction at the outer support ring, and was considerably reduced by inserting a compliant silicone glue ring. The same glue ring was used to permanently bond the sensor to a rigid base, thereby giving well-defined and constant boundary conditions and also considerably improving the repeatability of the sensitivity. Overall, hysteresis and repeatability error were reduced down to a level of ca. 1%. |
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