Preparation and Characterization of Superconducting B1-Type Mo1-xNbxN Thin Films

Solid-solution thin films, Mo_1?xNb_xN, with B1 (NaCl) structure have been deposited on substrates at 450°C by reactive sputtering of composite targets with Mo and Nb metals in an equimolar Ar and N₂ gas mixture. The lattice parameter of the solid solution increased linearly with an increase of Nb content, x . The superconducting transition temperature, T _c, of the Mo-rich films ( x ≦ 0.12) was around 6 K, which was lower than that expected from theoretical prediction. The residual resistivity ratio, r =ρ(300 K)/ρ(20 K), of the films varied with x , and a minimum value of r was observed in the vicinity of x = 0.5.