Textured surface boron-doped ZnO transparent conductive oxides on polyethylene terephthalate substrates for Si-based thin film solar cells |
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Authors: | Xin-liang Chen Quan LinJian Ni De-kun ZhangJian Sun Ying ZhaoXin-hua Geng |
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Affiliation: | Institute of Photo-electronic Thin Film Devices and Technology, Nankai University, Tianjin 300071, People's Republic of China Tianjin Key laboratory of Photo-electronic Thin Film Devices and Technology, Nankai University, Tianjin 300071, People's Republic of China Key laboratory of Opto-electronic Information Science and Technology for Ministry of Education, Nankai University, Tianjin 300071, People's Republic of China |
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Abstract: | Textured surface boron-doped zinc oxide (ZnO:B) thin films were directly grown via low pressure metal organic chemical vapor deposition (LP-MOCVD) on polyethylene terephthalate (PET) flexible substrates at low temperatures and high-efficiency flexible polymer silicon (Si) based thin film solar cells were obtained. High purity diethylzinc and water vapors were used as source materials, and diborane was used as an n-type dopant gas. P-i-n silicon layers were fabricated at ~ 398 K by plasma enhanced chemical vapor deposition. These textured surface ZnO:B thin films on PET substrates (PET/ZnO:B) exhibit rough pyramid-like morphology with high transparencies (T ~ 80%) and excellent electrical properties (Rs ~ 10 Ω at d ~ 1500 nm). Finally, the PET/ZnO:B thin films were applied in flexible p-i-n type silicon thin film solar cells (device structure: PET/ZnO:B/p-i-n a-Si:H/Al) with a high conversion efficiency of 6.32% (short-circuit current density JSC = 10.62 mA/cm2, open-circuit voltage VOC = 0.93 V and fill factor = 64%). |
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Keywords: | Flexible substrates LP-MOCVD ZnO thin films Textured surface Solar cells |
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