Virtual separation approach to study porous ultra-thin films by combined spectroscopic ellipsometry and quartz crystal microbalance methods期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Virtual separation approach to study porous ultra-thin films by combined spectroscopic ellipsometry and quartz crystal microbalance methods

Authors:	K.B. Rodenhausen M. Schubert

Affiliation:	^a Department of Chemical and Biomolecular Engineering, University of Nebraska-Lincoln, USA ^b Nebraska Center for Materials and Nanoscience, University of Nebraska-Lincoln, USA ^c Department of Electrical Engineering, University of Nebraska-Lincoln, USA

Abstract:	Spectroscopic ellipsometry (SE) and quartz crystal microbalance with dissipation (QCM-D) techniques have been extensively used as independent surface characterization tools to monitor in-situ thin film formation. They provide different information for ultra-thin films because QCM-D is sensitive to the solvent content while SE is not. For using these two techniques in tandem, we present a virtual separation approach to enable the determination of both ultra-thin film thickness and porosity. Assumptions for the intrinsic molecular polarizability (index of refraction n_o) and density (ρ_o) of the organic adsorbent must be made, and the consequences for these parameters' values are discussed.

Keywords:	Spectroscopic ellipsometry Quartz crystal microbalance Organic thin films
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