| 环境检测与控制用组合传感器研究 |
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| 引用本文： | 谢光忠,蒋亚东,杨邦朝.环境检测与控制用组合传感器研究[J].电子测量与仪器学报,2004,18(4):21-24. |
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| 作者姓名： | 谢光忠 蒋亚东 杨邦朝 |
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| 作者单位： | 电子科技大学光电信息学院;电子科技大学微电子与固体电子学院,成都,610054 |
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| 摘 要： | 本文分别采用磁控溅射方法、旋涂法及烧结工艺制备了铂电阻温度传感器、聚酰亚胺电容式湿度传感器及氧化锆氧气敏传感器,用MCM技术对可用于检测室内温度、湿度及氧气浓度的组合传感器进行了结构设计,并对制备的温度传感器、湿度传感器及氧气敏传感器的特性进行了测试和讨论.
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| 关 键 词： | 温度传感器 湿度传感器 氧气传感器 组合传感器 |
Research of Combined Sensors for Environmental Detection and Control |
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| Xie Guangzhong,Jiang Yadong,Yang Bangcao.Research of Combined Sensors for Environmental Detection and Control[J].Journal of Electronic Measurement and Instrument,2004,18(4):21-24. |
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| Authors: | Xie Guangzhong Jiang Yadong Yang Bangcao |
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| Affiliation: | Xie Guangzhong1 Jiang Yadong1 Yang Bangcao2 |
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| Abstract: | Platinum temperature sensor, polyimide capacitive h um idity sensor and zirconia oxygen sensors are made by magnetic sputtering technol ogy, spin-coating method and sinter technology respectively. Using MCM technolog y, the structure of combined sensors for detecting environmental temperature, hu midity and oxygen and assessing the comfort of room have been designed. All the sensors used in the combined sensors have been characterized and discussed. |
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| Keywords: | Temperature sensor humidity sensor oxygen sensor c ombined sensors |
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