| 微型旋转超声电机的发展和现状 |
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| 引用本文： | 朱华,赵淳生.微型旋转超声电机的发展和现状[J].压电与声光,2005,27(6):627-630,642. |
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| 作者姓名： | 朱华 赵淳生 |
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| 作者单位： | 南京航空航天大学,超声电机研究中心,江苏,南京,210016 |
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| 基金项目： | 国家自然科学基金重点资助项目（50235010） |
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| 摘 要： | 系统地总结了微型旋转超声电机的发展，详细地叙述了各种微型电机的驱动机理、工艺方法和性能指标，并分析了各自的优缺点。讨论了在微型旋转电机设计中应注意的一些关键问题，为下一步微型旋转超声电机以及MEMS驱动器的研究工作提供了参考依据。
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| 关 键 词： | 微型旋转超声电机 MEMS 驱动器 |
| 文章编号： | 1004-2474（2005）06-0627-04 |
| 收稿时间： | 2004-04-26 |
| 修稿时间： | 2004-04-26 |
The Review of Rotational Ultrasonic Micro-motor |
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| ZHU Hua,ZHAO Chun-sheng.The Review of Rotational Ultrasonic Micro-motor[J].Piezoelectrics & Acoustooptics,2005,27(6):627-630,642. |
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| Authors: | ZHU Hua ZHAO Chun-sheng |
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| Affiliation: | Research Center of Ultrasonic Motor, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China |
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| Abstract: | In this review, the history of development of rotational ultrasonic micro-motor has been summarized systematically. Various principles and their fabrication processes of ultrasonic micro-motors are introduced in details as well as their performances. The advantages and disadvantages of different type of micro-motors have been compared. In order to offer the reference basis with directive significance for further research works of rotational ultrasonic micro-motors and micro-actuators in MEMS, several key design issues of ultrasonic micro-motor have been discussed. |
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| Keywords: | rotational ultrasonic micro-motor MEMS actuators |
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