| 微电铸层均匀性的影响研究 |
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| 引用本文： | 王星星,雷卫宁,姜博.微电铸层均匀性的影响研究[J].电镀与环保,2010,30(4):10-13. |
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| 作者姓名： | 王星星 雷卫宁 姜博 |
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| 作者单位： | 江苏工业学院机械与能源工程学院,江苏,常州,213016;江苏技术师范学院机械与汽车工程学院,江苏,常州,213001;江苏技术师范学院机械与汽车工程学院,江苏,常州,213001 |
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| 摘 要： | 微电铸技术加工的器件往往存在铸层不均匀的缺陷,导致其质量和性能大大降低.针对微电铸的不均匀性,介绍了微电铸工艺流程,从几何因素和电化学因素两方面对微电铸层均匀性的影响进行了综述.
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| 关 键 词： | 微电铸 工艺 均匀性 影响 |
A Study of the Impact on the Uniformity of Micro-electroforming Deposits |
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| WANG Xing-xing,LEI Wei-ning,JIANG Bo.A Study of the Impact on the Uniformity of Micro-electroforming Deposits[J].Electroplating & Pollution Control,2010,30(4):10-13. |
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| Authors: | WANG Xing-xing LEI Wei-ning JIANG Bo |
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| Affiliation: | WANG Xing-xing~(1,2),LEI Wei-ning~2,JIANG Bo~(1,2)(1.College of Mechanical and Energy Engineering,Jiangsu Polytechnic University,Changzhou 213016,China,2.College of Mechanical Engineering,Jiangsu Teachers University of Technology,Changzhou 213001,China) |
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| Abstract: | The parts processed by micro-electroforming technology always have the defects of uneven electroforming deposits,resulting in very poor quality and performance.In light of non-uniformity of micro-electroforming,the process of(micro-electroforming) is introduced,and the factors influencing the uniformity of micro-electroforming deposits are reviewed both geometrically and electrochemically. |
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| Keywords: | micro-electroforming process uniformity effect |
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