| 基于PET的ITO薄膜激光刻蚀研究 |
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| 引用本文： | 黄健,周苏.基于PET的ITO薄膜激光刻蚀研究[J].佳木斯工学院学报,2012(4):536-539. |
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| 作者姓名： | 黄健 周苏 |
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| 作者单位： | [1]同济大学汽车学院 [2]同济大学新能源汽车工程中心 [3]同济大学中德学院,上海201804 |
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| 摘 要： | 使用波长为1064纳米的皮秒激光脉冲从前后两侧对PET基体上的ITO薄膜进行刻蚀.通过拉曼光谱仪得到光斑的直径找出焦点并计算该处的光束直径与阀值能量密度.而依据白光干涉显微镜得到光斑的深度可以估算能使ITO薄膜完全移除但PET基体不被破坏的能量密度窗口.实验结果表明,前侧相比后侧具有更小的阀值能量密度和更大的能量密度窗口.
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| 关 键 词： | ITO PET 皮秒激光 阀值能量密度 能量密度窗口 |
Laser Ablation of ITO Film on PET Substrate |
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| Authors: | HUANG Jian ZHOU Su |
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| Affiliation: | 1. Clean Energy Automotive Engineering Center 2. Sino - German Postgraduate School, 3. School of Automotive Studies, Tonal U- niversity, Shanghai 201804, China ) |
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| Abstract: | Pulsed picosecond laser ablation of ITO film on PET substrate was investigated with 1064 nm wavelength from the front side and the back side. The ablation spot diameter can be obtained by Raman spectros- copy. It is helpful for finding the focus and calculating the beam radius and the threshold fluence. With the spot depth, obtained by white - light interference microscope, it is possible to find the fluence window for a complete removal of ITO film without damaging the PET substrate. The results showed that the threshold fluence is smaller and the fluence window is＇ bigger from the front side compared to from the back side. |
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| Keywords: | ITO PET picosecond laser threhold fluence fluence window |
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