低频机械谱术测量薄膜切变模量及微量油膜探测

描述了工作在共振和次共振模式下的低频机械波谱仪的基本原理．主要介绍了研究金属衬底上薄膜的物理性质的两种方法：第一种方法，用于测量沉积在钼丝上的TiN／Ti(C，N)多层膜的切变模量和内耗；第二种方法，用于探测钢片表面微量油膜的存在．尽管这两种技术有着各自不同的应用目的及对象，但它们均源自能够导致机械能损耗的表面效应。

EVALUATION OF THE SHEAR MODULUS OF THIN FILMS AND DETECTION OF THIN-OIL FILMS BY LOW-FREQUENCY MECHANICAL SPECTROSCOPY

The basic concept for the low-frequency mechanical spectrometer operating both in the resonant and subresonant mode is described. Two methods for studying the physical properties of thin films on a metallic substrate are briefly presented. The first method makes possible measurements of the shear modulus and internal friction of a TiN/Ti(C, N) multi-layer film deposited on a Mo wire. The second method enables detection of extremely fine traces of oil film present on the surface of steel sheets. Although the two techniques described in this paper have different applications, they are both related to surface effects which result in loss of mechanical energy.