Properties of thin In2O3 and SnO2 films prepared by corona spray pyrolysis, and a discussion of the spray pyrolysis process

Thin films of doped In₂O₃ and SnO₂ were prepared by the “corona spray pyrolysis” technique with a deposition efficiency of 80%. The electrical and optical properties of the films were determined. A transmission of 88% in the visible region and an IR reflection of more than 90% were the maximum values obtainable for a doped In₂O₃ film.

A detailed discussion of the physical and chemical processes that occur during spray pyrolysis is presented to aid the understanding of this coating technique.

A minimum temperature of about 350°C for the formation of In₂O₃ was empirically confirmed.

Furthermore the powdery precipitate obtained during deposition of In₂O₃ was clearly identified as polycrystalline In₂O₃ formed by a homogeneous reaction.