Thin films of doped In2O3 and SnO2 were prepared by the “corona spray pyrolysis” technique with a deposition efficiency of 80%. The electrical and optical properties of the films were determined. A transmission of 88% in the visible region and an IR reflection of more than 90% were the maximum values obtainable for a doped In2O3 film. A detailed discussion of the physical and chemical processes that occur during spray pyrolysis is presented to aid the understanding of this coating technique. A minimum temperature of about 350°C for the formation of In2O3 was empirically confirmed. Furthermore the powdery precipitate obtained during deposition of In2O3 was clearly identified as polycrystalline In2O3 formed by a homogeneous reaction. |