| MEMS薄膜平均应力梯度及弹性模量在线提取方法 |
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| 引用本文： | 戎华,黄庆安,王鸣. MEMS薄膜平均应力梯度及弹性模量在线提取方法[J]. 电子学报, 2007, 35(2): 311-314 |
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| 作者姓名： | 戎华 黄庆安 王鸣 |
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| 作者单位： | 南京师范大学光电技术江苏省重点实验室,江苏南京,210097;东南大学MEMS教育部重点实验室,江苏南京,210096;东南大学MEMS教育部重点实验室,江苏南京,210096;南京师范大学光电技术江苏省重点实验室,江苏南京,210097 |
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| 摘 要： | 提出了一种利用静电作用下悬臂梁的吸合电压提取MEMS薄膜沿厚度方向的平均应力梯度及弹性模量的方法,该方法的关键在于实现悬臂梁吸合电压的快速、精确计算.考虑了悬臂梁由应力梯度引起的沿宽度方向的弯曲,提高了吸合电压的计算精度.实际模拟表明该测量方法计算速度快、精度高,能够应用于实际工艺过程中材料参数的在线测量.
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| 关 键 词： | 悬臂梁 吸合电压 平均应力梯度 弹性模量 |
| 文章编号： | 0372-2112（2007）02-0311-04 |
| 收稿时间： | 2006-02-08 |
| 修稿时间： | 2006-02-082006-09-04 |
A Method for In-Situ Measuring Average Stress Gradient and Elastic Modulus of a MEMS Film |
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| RONG Hua,HUANG Qing-an,WANG Ming. A Method for In-Situ Measuring Average Stress Gradient and Elastic Modulus of a MEMS Film[J]. Acta Electronica Sinica, 2007, 35(2): 311-314 |
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| Authors: | RONG Hua HUANG Qing-an WANG Ming |
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| Affiliation: | 1. Jiangsu Province Key Laboratory of Optoelectronic Technology,Nanjing Normal University,Nanjing,Jiangsu 210097,China;2. Key Laboratory of MEMS of Education Ministry,Southeast University,Nanjing,Jiangsu 210096,China |
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| Abstract: | An electrostatically actuated in-situ measuring method for average stress gradient and elastic modulus of a MEMS film was proposed based on pull-in voltages of a set of cantilevers. The key of the measuring method is to realize rapid and accurate calculation of pull-in voltages of the cantilevers. To increase the accuracy of the measurement, bending of the cantilevers along the width direction due to the stress gradient was considered. Actual simulations indicate that the calculating speed and the accuracy of the measuring method are ideal, and the method can apply to in-situ masurement. |
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| Keywords: | cantilever pull-in voltage average stress gradient elastic modulus |
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