Synthesis of titanium dioxide nanoparticles by reactive DC magnetron sputtering

Nanometer-sized titanium dioxide (TiO₂) particles were prepared on carbon substrates by reactive direct-current magnetron sputtering. By performing measurements with high resolution electron microscopes, the mean nanoparticle diameter and the coverage fraction of the substrate by the nanoparticles (NPs) were measured at 19 nm and 30%, respectively. Moreover, electron diffraction analysis showed that the TiO₂ NPs' crystalline structure on the carbon substrate was a mixture of anatase and rutile. Finally, we provided information on the TiO₂ initial growth stage: crystalline NPs were formed after deposition of amorphous nanoparticles on the substrate and heating.