Synthesis of titanium dioxide nanoparticles by reactive DC magnetron sputtering |
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Authors: | Laurent Dreesen Jean-Franois Colomer Herv Limage Alexandre Gigure Stphane Lucas |
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Affiliation: | aBiophotonics-Department of Physics, University of Liège, B-4000 Liège, Belgium;bResearch Centre in Physics of Matter and Radiation (PMR-LPS), University of Namur (FUNDP), 61 rue de Bruxelles, B-5000 Namur, Belgium;cResearch Centre in Physics of Matter and Radiation (PMR-LARN), University of Namur (FUNDP), 61 rue de Bruxelles, B-5000 Namur, Belgium |
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Abstract: | Nanometer-sized titanium dioxide (TiO2) particles were prepared on carbon substrates by reactive direct-current magnetron sputtering. By performing measurements with high resolution electron microscopes, the mean nanoparticle diameter and the coverage fraction of the substrate by the nanoparticles (NPs) were measured at 19 nm and 30%, respectively. Moreover, electron diffraction analysis showed that the TiO2 NPs' crystalline structure on the carbon substrate was a mixture of anatase and rutile. Finally, we provided information on the TiO2 initial growth stage: crystalline NPs were formed after deposition of amorphous nanoparticles on the substrate and heating. |
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Keywords: | Nanoparticles Titanium dioxide DC magnetron sputtering Scanning transmission electron microscopy Transmission electron microscopy |
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