| 微波CVD法在硬质合金工具表面合成金刚石薄膜的研究 |
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| 引用本文： | 李成明,吕反修.微波CVD法在硬质合金工具表面合成金刚石薄膜的研究[J].兵工学报,1997,18(1):73-76. |
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| 作者姓名： | 李成明 吕反修 |
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| 作者单位： | [1]太原工业大学 [2]北京科技大学 |
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| 摘 要： | 采用微波ＣＶＤ法对硬质合金表面金刚石的形核和金刚石薄膜的沉积进行了探索性研究，用激光喇曼谱仪对金刚石进行表征。研究了在硬质合金工具衬底沉积金刚石薄膜的结合强度。
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| 关 键 词： | 微波CVD 硬质合金 金刚石薄膜 |
A STUDY OF DIAMOND FILMS DEPOSITED ON HARD ALLOY TOOLS THROUGH MICROWAVE CVD |
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| Li Chengming, Wang Jianming, Xu Zhong.A STUDY OF DIAMOND FILMS DEPOSITED ON HARD ALLOY TOOLS THROUGH MICROWAVE CVD[J].Acta Armamentarii,1997,18(1):73-76. |
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| Authors: | Li Chengming Wang Jianming Xu Zhong |
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| Abstract: | Diamond films necleus and its growth when deposited by microwave CVD on hard alloys are investigated. Diamond films are characterized by Raman spectra.Adhesion of diamond films and hard alloy is discussed. |
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| Keywords: | microwave CVD hard alloy diamond films adhesion |
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