| 氧化铝膜对铝诱导制备多晶硅薄膜的影响 |
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| 引用本文： | 唐正霞,沈鸿烈,鲁林峰,黄海宾,蔡红,沈剑沧. 氧化铝膜对铝诱导制备多晶硅薄膜的影响[J]. 真空科学与技术学报, 2010, 30(1). DOI: 10.3969/j.issn.1672-7126.2010.01.08 |
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| 作者姓名： | 唐正霞 沈鸿烈 鲁林峰 黄海宾 蔡红 沈剑沧 |
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| 作者单位： | 1. 南京航空航天大学材料科学与技术学院,南京,210016
2. 南京大学物理学系固体微结构物理国家重点实验室,南京,210093 |
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| 基金项目： | 国家高技术研究发展计划(863计划)，南京航空航天大学博士学位论文创新与创优基金 |
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| 摘 要： | 为了考察硅铝界面氧化铝膜对铝诱导多晶硅的影响,本文用磁控溅射方法制备了界面有无氧化铝膜的硅铝复合结构。XRD测试表明两种铝诱导方法均制备了具有(111)高度择优取向的多晶硅薄膜。光学显微镜和扫描电镜照片显示,有氧化铝膜时铝诱导的多晶硅薄膜有两层,下层为大晶粒(40μm-60μm)枝晶状多晶硅,拉曼谱显示其结晶质量接近单晶,而上层膜晶粒较小,结晶质量较差。无氧化铝膜时铝诱导的多晶硅薄膜只有单层结构,其晶体结构和结晶质量都与有氧化铝膜时铝诱导的上层多晶硅薄膜相似。结果表明,硅铝界面上氧化铝的存在大大提高了铝诱导多晶硅薄膜的质量,但是另一方面也限制了铝诱导多晶硅的晶化速率。
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| 关 键 词： | 薄膜 铝诱导晶化 多晶硅 氧化铝膜 |
Impact of Alumina Coatings on Aluminum-Induced Crystallization of Polycrystalline Silicon Films |
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| Tang Zhengxia,Shen Honglie,Lu Linfeng,Huang Haibin,Cai Hong,Shen Jianchang. Impact of Alumina Coatings on Aluminum-Induced Crystallization of Polycrystalline Silicon Films[J]. JOurnal of Vacuum Science and Technology, 2010, 30(1). DOI: 10.3969/j.issn.1672-7126.2010.01.08 |
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| Authors: | Tang Zhengxia Shen Honglie Lu Linfeng Huang Haibin Cai Hong Shen Jianchang |
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| Affiliation: | Tang Zhengxia1,Shen Honglie1*,Lu Linfeng1,Huang Haibin1,Cai Hong1,Shen Jianchang2(1.College of Materials Science & Technology,Nanjing University of Aeronautics & Astronautics,Nanjing,210016,China,2.National Laboratory of Solid State Microstructure , Department of Physics,Nanjing University,210093,China) |
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| Abstract: | The polycrystalline silicon films were grown by magnetron sputtering on Corning Eagle 2000 glass substrate,and on the glass substrate coated with alumina films,respectively.The microstructures of the poly-silicon films were characterized with X-ray diffraction(XRD),scanning electron microscopy(SEM),Raman spectroscopy and optical microscopy.The impact of the alumina coating on the aluminum-induced crystallization of the poly-silicon films was studied.The results show that though the alumina coating limits th... |
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| Keywords: | Thin film Aluminum-induced crystallization Polycrystalline silicon Alumina film |
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