Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform |
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Authors: | Ishibashi A Kaiju H Yamagata Y Kawaguchi N |
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Affiliation: | Lab. of Quantum Electron., Hokkaido Univ., Sapporo, Japan; |
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Abstract: | Analysis of achieving a clean environment in a connected box-units system is performed. By feedback of outlet air into the inlet of the box-unit, the steady-state airborne-particle-count in the system becomes independent of the ambient particle count and depends little on the particle-arrest efficiency of the filter. It is demonstrated that ISO 3 (209D Class 1) cleanliness in an inexpensive compact manner with the versatile extensive connected box-units system can be realised, no matter how dusty the ambient. |
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