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Thermoresistance of p‐Type 4H–SiC Integrated MEMS Devices for High‐Temperature Sensing |
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| Authors: | Toan Dinh Tuan‐Khoa Nguyen Hoang‐Phuong Phan Quan Nguyen Jisheng Han Sima Dimitrijev Nam‐Trung Nguyen Dzung Viet Dao |
| Abstract: | |
| Keywords: | high temperatures MEMS sensors silicon carbide thermoresistance |