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On the Properties of Nanoporous SiO2 Films for Single Layer Antireflection Coating |
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| Authors: | Lilit Ghazaryan,Yusuf Sekman,Sven Schr der,Christian Mü hlig,Igor Stevanovic,Roelene Botha,Morteza Aghaee,Mariadriana Creatore,Andreas Tü nnermann,Adriana Szeghalmi |
| Affiliation: | Lilit Ghazaryan,Yusuf Sekman,Sven Schröder,Christian Mühlig,Igor Stevanovic,Roelene Botha,Morteza Aghaee,Mariadriana Creatore,Andreas Tünnermann,Adriana Szeghalmi |
| Abstract: | |
| Keywords: | antireflection coatings atomic layer deposition laser induced damage threshold nanoporous SiO2 films |