多晶硅制备工艺及发展趋势

简述了国内外多晶硅生产工艺的发展和现状，对比分析了各种多晶硅制备方法在产能、能耗及环境友好特性等方面的特点及其发展趋势。提出目前多晶硅制备技术主要有3个发展方向：①不断改进西门子工艺，包括尾气分离，四氯化硅氢化制备三氯氢硅，改进还原炉结构，加大炉体直径以提高产量、降低成本，三氯氢硅及氢气的纯化；②不断完善流态化技术方法，包括降低反应器内壁面上的硅沉积、减少无定形硅粉的形成、硅烷制备技术的改善；③不断完善冶金法工艺体系，包括提高产品纯度、减少杂质含量的波动性。

Progress in preparation technology of polysilicon

The present status of polysilicon production technology is investigated. The capacity，energy consumption and environment-friendly features of various methods are compared for the preparation of polysilicon. Three main directions of present development in the production of polycrystalline silicon were proposed：① the improvement of Siemens process，including exhaust gas separation，trichlorosilane production by the hydrogenation of silicon tetrachloride，improved reduction furnace structure，increased furnace diameter for the increase of production，and the purification of trichlorosilane and hydrogen；② the improvement of fluidized bed methods，including the decrease of silicon deposition on the surface of the inner wall of a reactor，the reduction of the formation of amorphous silica particle and the improvement of silane preparation technology；③ the improvement of metallurgical method，including the improvement of product purity，the reduction of the volatility of impurity content.