Numerical calculation of pulsed laser deposited film profiles |
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Authors: | Z K ntor,T Szvrinyi |
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Affiliation: | Z Kántor,T Szvrinyi |
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Abstract: | Pulsed laser deposition (PLD) is a straightforward method for production of the widest variety of materials, especially multicomponent oxides, in the form of thin film. One of the particular advantages of this technique, the possibility of control of film composition, is ensured by applying (reactive) atmospheres of pressures up to tenths of millibars. |
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