A Power Meter for a Radio Frequency Cathode Sputtering Installation |
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| Authors: | A G Nagornyi S V Kolinko |
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| Affiliation: | (1) National Academy of Sciences of Ukraine, Institute of Applied Physics, ul. Petropavlovskaya 58, Sumy, 40038, Ukraine |
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| Abstract: | A meter of the radio frequency power deposited in a gas discharge of a magnetron sputtering system of an installation for depositing thin films is described. The device is based on a KP525  2 integral analog multiplier. The power measurement range is 10–1000 W, the operating frequency is 13.56 MHz, and the measurement error is within ±3%. |
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