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Ion implantation in AlxGa1-xAs: damagestructures and amorphization mechanisms |
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| Authors: | Lagow B.W. Turkot B.A. Robertson I.M. Coleman J.J. Roh S.D. Forbes D.V. Rehn L.E. Baldo P.M. |
| Affiliation: | Frederick Seitz Mater. Res. Lab., Illinois Univ., Urbana, IL; |
| Abstract: | |
| Keywords: | |