静电防护测量仪器综述

静电防护测量仪器是依据静电防护标准中的技术指标要求设计的.本文分析了静电防护被测对象的技术要求和特点,以及它们所依据的技术标准,总结归纳了静电防护领域常用的测量仪器,按照被测参量分为:电阻、静电电压、静电电荷量以及静电放电屏蔽等测量仪器,列举了典型仪器的测量原理、特点,以及各类仪器的发展趋势.

Review of measurement instruments for ESD protection

The measurement instruments for ESD protection are designed according to the specification require-ments in many ESD standards.In this paper,the characteristic and technical requirement of the object under test were analyzed,and the technical standards that the object according to was also analyzed,and the general measurement instru-ments used in the field of ESD protection was summarized.Sorting by the parameter under test,these instruments can be separated into few kinds such as resistance,static voltage,static charge and ESD shield.The typical measurement princi-ple,characteristic and development of these instruments are given.